Mechanisms for the production of negative ions in sputtering sources
- 1 December 1979
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 167 (2) , 249-254
- https://doi.org/10.1016/0029-554x(79)90012-0
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Improvement of the emittance of a Middleton type sputter sourceNuclear Instruments and Methods, 1976
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Physical Properties and Interrelationships of Metallic and Semimetallic ElementsPublished by Elsevier ,1964
- Emission of Negative Ions from Metal Surfaces Bombarded by Positive Cesium IonsJournal of Applied Physics, 1962