Microfabrication of lenses of a miniaturized electron column
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 467-470
- https://doi.org/10.1016/0167-9317(94)00147-m
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Evaluation and application of a very high performance chemically amplified resist for electron-beam lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Combinations of point source electron beams and simple electrostatic lenses: Initial demonstrations of micron-scale lensesReview of Scientific Instruments, 1993
- Micromachined electrostatic electron sourceJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Microminiaturization of electron optical systemsJournal of Vacuum Science & Technology B, 1990