X-ray plasma source design simulations
- 1 December 1993
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (34) , 6911-6913
- https://doi.org/10.1364/ao.32.006911
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- X-ray production ~13 nm from laser-produced plasmas for projection x-ray lithography applicationsApplied Optics, 1993
- X-ray emission in laser-produced plasmasJournal of Applied Physics, 1973