Effect of a magnetic filter on hydrogen ion species in a multicusp ion source

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Abstract
Hydrogen ion species and discharge characteristics have been compared for two different magnet geometries in a multicusp ion source. One magnet configuration indicated that the H2+ ion percentage in the extracted beam could be reduced by eliminating the high energy ionizing electrons near the ion extraction region. To accomplish this and maintain the desired features of both magnet geometries, a magnetic filter was installed near the source exit. With this combined arrangement, we found that the H+ ion percentage and discharge condition were much improved and a more uniform density profile across the extraction plane was achieved. The atomic species fraction can then be further enhanced by the addition of low‐energy (∼16 eV) primary electrons into the source plasma chamber.

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