Initial Results on Thick 4H-SiC Epitaxial Layers Grown Using Vapor Phase Epitaxy

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 161-164
• https://doi.org/10.4028/www.scientific.net/msf.338-342.161

Abstract

Keywords

• EPITAXY
• TANTALUM CARBIDE