Photolithographic micromolding of ceramics using plasma etched polyimide patterns
- 13 December 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (24) , 3379-3381
- https://doi.org/10.1063/1.110151
Abstract
Features as fine as 4 μm with high aspect ratio were produced from ceria-zirconia ceramic using a thick plasma-etched polyimide layer as a micromold.Keywords
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