Multiple layers of silicon-on-insulator (MLSOI) islands fabrication process and fully-depleted SOI pMOSFETs

Publisher Website

27 November 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 15-16
https://doi.org/10.1109/soi.1998.723079

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Gigascale integration: is the sky the limit?
IEEE Circuits and Devices Magazine, 1996