A technique for the production of a thin film with a linearly varying composition

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Abstract
A technique is described for the fabrication of a single thin film sample with a controlled variation in composition. Vacuum evaporation through a thickness controlling aperture (in the shape of an Archimedes spiral) onto a rotating substrate yields a sample with alternating wedge-shaped films in which the composition varies linearly with distance. The composition gradient of these samples spans the entire range of a phase diagram thereby allowing thermal annealing and ion irradiation studies as a function of position (composition) on the film. Rutherford backscattering is used to investigate the films while on the NaCl substrate, and energy dispersive spectroscopy and electron diffraction are used to study the self-supporting films on transmission electron microscope grids after dissolution of the substrate.

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