The effect of backscattered electrons on the resolution of scanning Auger microscopy
- 1 October 1978
- journal article
- Published by Elsevier in Surface Science
- Vol. 77 (2) , 351-364
- https://doi.org/10.1016/0039-6028(78)90011-0
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Nucleation and growth in the system Ag/Mo(100): A comparison of UHV-SEM and AES/LEED observationsSurface Science, 1978
- On the influence of backscattered electrons on the lateral resolution in scanning auger microscopyApplied Physics A, 1977
- Direct observation of grain-boundary diffusion by scanning Auger microscopyPhilosophical Magazine, 1977
- A digital scanning Auger electron microscope incorporating a concentric hemispherical analyserProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1977
- A ratio technique for micro-Auger analysisSurface Science, 1977
- Scanning auger electron microscopy at 30 nm resolutionPhilosophical Magazine, 1976
- Exit angle dependence of penetration depth of backscattered electrons in the scanning electron microscopePhysica Status Solidi (a), 1976
- Angular dependence of auger electron emission from Cu (111) and (100) surfacesSurface Science, 1975
- Auger electron spectroscopy at high spatial resolution and nA primary beam currentsJournal of Vacuum Science and Technology, 1975
- High−spatial resolution Auger spectroscopy and Auger integration applicationsJournal of Vacuum Science and Technology, 1975