Formation and Characterization of Amorphous Aluminum Nitride Powder and Transparent Aluminum Nitride Film by Chemical Vapor Deposition
- 1 June 1991
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 74 (6) , 1331-1334
- https://doi.org/10.1111/j.1151-2916.1991.tb04107.x
Abstract
No abstract availableKeywords
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