The fabrication of high resolution features by mould injection
- 31 March 1998
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 41-42, 211-214
- https://doi.org/10.1016/s0167-9317(98)00048-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- 3 nm NiCr wires made using electron beam lithography and PMMA resistMicroelectronic Engineering, 1996