Ultrasonic linear motor for a high precision X-Y stage

• 13 January 2003
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 657-660
• https://doi.org/10.1109/ultsym.1989.67066

Abstract

Keywords

• HIGH PRECISION X
• X Y STAGE
• LINEAR MOTOR
• ULTRASONIC LINEAR