Ion beam assisted deposition of AlN monolithic films and Al/AlN multilayers: a comparative study
- 1 May 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 103-104, 334-339
- https://doi.org/10.1016/s0257-8972(98)00410-1
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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