Deposition of CdS by evaporation through a gas discharge
- 1 January 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (1) , 188-190
- https://doi.org/10.1116/1.568753
Abstract
Cadmium sulfide is an important material used in thin−film photovoltaic devices. The deposition of cadmium sulfide films by single indirect source evaporation through a gas discharge is investigated and the effects of the discharge on film properties and deposition rates are discussed. The discharge has a direct and advantageous effect on both the electrical and optical properties of the CdS thin films. These properties may be altered by suitable choices of evaporation and gas discharge parameters. Control of these properties is important in device applications and it is proposed that this technique is a practical method for controlling properties of CdS thin films.Keywords
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