Floating-membrane thermal vacuum sensor
- 1 July 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 14 (3) , 259-268
- https://doi.org/10.1016/0250-6874(88)80073-8
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Double-beam integrated thermal vacuum sensorJournal of Vacuum Science & Technology A, 1987
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- Integrated vacuum sensorSensors and Actuators, 1985
- Thermal Accommodation Coefficients on Gas-covered Tungsten, Nickel and Platinum1Journal of the American Chemical Society, 1957