Machining of sub-micron holes using a femtosecond laser at 800 nm
- 1 January 1995
- journal article
- Published by Elsevier in Optics Communications
- Vol. 114 (1-2) , 106-110
- https://doi.org/10.1016/0030-4018(94)00585-i
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fsApplied Physics Letters, 1994
- Quintic-phase-limited, spatially uniform expansion and recompression of ultrashort optical pulsesOptics Letters, 1993
- Multikilohertz Ti:Al_2O_3 amplifier for high-power femtosecond pulsesOptics Letters, 1991
- A novel method for simulating laser-solid interactions in semiconductors and layered structuresMaterials Science and Engineering: B, 1989