Sensitivity enhancement in lateral capacitive accelerometersby structure width optimsation

27 February 1997

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 33 (5) , 384-386
https://doi.org/10.1049/el:19970256

Abstract

An optimum assignment is found for the distribution of area in surface micromachined lateral capacitive accelerometers between stationary and moving electrodes to improve the S/N ratio of the sensor. Depending on etching hole geometry, the sensitivity can increase by a factor of up to 1.76.

Keywords

SNR IMPROVEMENT
STATIONARY ELECTRODES
LATERAL CAPACITIVE ACCELEROMETERS
MOVING ELECTRODES
ETCHING HOLE GEOMETRY
STRUCTURE WIDTH OPTIMISATION
AREA DISTRIBUTION
OPTIMUM ASSIGNMENT
S/N RATIO
SENSITIVITY ENHANCEMENT
MICROMACHINED ACCELEROMETERS

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