Miniaturized e-beam writer: Testing of components
- 4 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 155-158
- https://doi.org/10.1016/0167-9317(94)00078-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Arrayed miniature electron beam columns for high throughput sub-100 nm lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Electron optical performance of a scanning tunneling microscope controlled field emission microlens systemJournal of Vacuum Science & Technology B, 1989
- Generation and applications of finely focused beams of low-energy electronsJournal of Vacuum Science and Technology, 1981