Analysis of acoustic properties of multi-layered structures by means of effective acoustic impedance matrix
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
The effective acoustic impedance matrix (Z(k)) is proposed, and its applications are discussed. After defining (Z(k)), it is shown that (Z(k)) for any kind of multilayered structure can be determined successively from the bottom substrate to the top layer. The use of (Z(k)) obviates some problems often occurring in the numerical calculation of multilayered structures. Using three typical examples, it is shown how (Z(k)) can be conveniently applied to characterize acoustic wave excitation and propagation in certain complicated layered structures as well as in semi-infinite substrates.Keywords
This publication has 7 references indexed in Scilit:
- Surface acoustic wave filters in ZnO-SiO/sub 2/-Si layered structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Non-leaky, piezoelectric, quasi-shear-horizontal type SAW on X-cut LiTaO/sub 3/Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Estimation of Elastic Constants, Mass Density and Thickness of Thin Films from SAW Velocity DispersionJapanese Journal of Applied Physics, 1990
- An acoustic micrometer and its application to layer thickness measurementsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989
- Multilayer ZnO Acoustic Transducers at Millimeter-Wave FrequenciesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1987
- Analysis of Generation and Detection of Surface and Bulk Acoustic Waves by Interdigital TransducersIEEE Transactions on Sonics and Ultrasonics, 1977
- Propagation of acoustic surface waves in multilayers: A matrix descriptionApplied Physics Letters, 1973