Miniature spectrometers for biochemical analysis
Open Access
- 31 January 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (1) , 61-66
- https://doi.org/10.1016/s0924-4247(97)80225-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Surface-micromachined free-space micro-optical systems containing three-dimensional microgratingsApplied Physics Letters, 1995
- Integrated grating/detector array fabricated in silicon using micromachining techniquesSensors and Actuators A: Physical, 1992
- Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting MasksJapanese Journal of Applied Physics, 1991
- Miniaturized spectrometer employing planar waveguides and grating couplers for chemical analysisApplied Optics, 1990