Mass Spectrometric Studies of Vapor Phase Crystal Growth

Publisher Website
Google Scholar
Abstract
A mass spectrometer has been coupled to an open tube vapor phase crystal growth apparatus in order to study vapor phase processes leading to the deposition of crystals. Examination of the HCl transport of gallium showed that was the main transporting species. It was found that vapor resulting from the thermal decomposition of , , and mixtures is very complex; dimers and tetramers of As and P, as well as various mixed species of the type , were present in the vapor phase. The reaction governing the deposition of crystals was found to be where . It was established that the mixed species also readily participate in the deposition reaction. Significant deviations from thermochemical equilibrium were detected in the deposition system. The causes of these deviations and their influence on the deposition process are discussed.

This publication has 0 references indexed in Scilit: