Influence of substrate material and ion bombardment on plasma-deposited fluorocarbon thin films

• 19 September 1994
• journal article
• research article
• Published by Wiley in Journal of Applied Polymer Science
• Vol. 53  (12) , 1631-1638
• https://doi.org/10.1002/app.1994.070531209

Abstract

Keywords

• THIN FILM