Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O System
- 1 January 1971
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 118 (5) , 768
- https://doi.org/10.1149/1.2408161
Abstract
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