Formation of thin Si3N4 films by nitrogen ion implantation into silicon

• 1 April 1979
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 58  (2) , 300
• https://doi.org/10.1016/0040-6090(79)90257-8

Abstract

Keywords

• SILICON
• THIN SI3N4
• SI3N4 FILMS
• ION IMPLANTATION
• NITROGEN ION
• FORMATION OF THIN