Ion projection lithography for resistless patterning of thin magnetic films
- 30 June 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 53 (1-4) , 605-608
- https://doi.org/10.1016/s0167-9317(00)00410-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Physical and magnetic properties of submicron lithographically patterned magnetic islandsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995