Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2
- 1 August 1990
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 68 (3) , 1018-1022
- https://doi.org/10.1063/1.346738
Abstract
Diamondlike a‐C:H films have been deposited by decomposition of C2H2. By the combination of Brillouin scattering and the ultralow load indentation technique, the following mechanical properties of the films were studied: the microhardness H, the Young’s modulus E, the shear modulus μ, and the Poisson’s ratio ν. From the measured data of mass density, hydrogen concentration, and the ratio of sp3/sp2 bonds the filling factors of these films were calculated. The results show that the hardness, Young’s modulus, and shear modulus of these films depend strongly on the volume concentration of voids and are directly proportional to the filling factor.This publication has 14 references indexed in Scilit:
- The properties of a-C:H films deposited by plasma decomposition of C2H2Journal of Applied Physics, 1990
- The study of mechanical properties of a-C:H films by Brillouin scattering and ultralow load indentationJournal of Applied Physics, 1989
- The deposition and study of hard carbon filmsJournal of Applied Physics, 1989
- Thermal gas effusion from hydrogenated amorphous carbon filmsApplied Physics Letters, 1987
- Progress in the Development of a Mechanical Properties MicroprobeMRS Bulletin, 1986
- Micromechanical investigations of amorphous hydrogenated carbon films on siliconJournal of Vacuum Science & Technology A, 1985
- Crystal structure of diamondlike carbon films prepared by ionized deposition from methane gasJournal of Applied Physics, 1984
- Hard carbon coatings with low optical absorptionApplied Physics Letters, 1983
- Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layersThin Solid Films, 1981
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971