Integrated LTCC Coils for Multiple Applications in Meso-Electro-Mechanical Systems

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Abstract
Often the designer of small electro-mechanical systems is willing to sacrifice small size and power consumption for the sake of low cost, ease of processing and enhanced yield. We have been working on the utilization of Low Temperature Co-fired Ceramic tapes (LTCC) for the implementation of intermediate scale (meso-scale) devices with the simultaneously or secondary task of micro-electronic packaging. We have designed and implemented several sensors and actuators having in common the utilization of electro-magnetic forces and interactions as the fundamental working mechanism. For this purpose we have designed and constructed a series of coils utilizing LTCC tapes suitable for multiple sensing and actuating tasks. As sensors, we have implemented a proximity sensor and a non-contact displacement sensor and a differential pressure sensor with a ferrofluidic core. As actuators we have implemented a normally closed valve and a Joule effect heater.

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