Microchannel plate detector for low voltage scanning electron microscopes

• 1 December 1985
• journal article
• Published by Wiley in Journal of Microscopy
• Vol. 140  (3) , 323-330
• https://doi.org/10.1111/j.1365-2818.1985.tb02686.x

Abstract

Keywords

• SEM
• METROLOGY
• LOW VOLTAGE
• MICROCHANNEL PLATE DETECTOR
• BACKSCATTERED ELECTRONS
• SECONDARY ELECTRONS
• SYMMETRY
• INTEGRATED CIRCUITS
• RESIST
• IMAGING