Crystal structure of sputter-synthesized CoNx thin films
- 15 December 1986
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (24) , 1644-1646
- https://doi.org/10.1063/1.97253
Abstract
This letter discusses the synthesis of CoNx films using rf diode reactive sputtering. It describes the properties of crystal structures in CoNx thin films and in particular, the post‐annealing effects on the crystal structures of CoNx. The CoNx films have the crystal structures of ε‐Co(hcp), α‐Co(fcc), α’‐Co(fcc) as a superstructure of α‐Co, γ‐Co3N(hcp), and δ‐Co2N(orthorhombic). The crystal structures have topotaxial relationships with each other, and exist in a wider composition range than in bulk.Keywords
This publication has 4 references indexed in Scilit:
- Magnetic properties of cobalt nitride thin filmsApplied Physics Letters, 1986
- Nitrogen-induced fcc phase in rf sputtered Co–Cr films having the hcp phase and perpendicular magnetic anisotropyJournal of Vacuum Science and Technology, 1982
- Magnetic Study on Hexagonal Nitrides of 3d Transition MetalsJournal of the Physics Society Japan, 1972
- Über das System Kobalt/Stickstoff. Metallamide und Metallnitride, I3. Mitt.2Zeitschrift für anorganische und allgemeine Chemie, 1945