Sputtered silicon thin films for piezoresistive pressure microsensors
- 15 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 685-688
- https://doi.org/10.1016/0924-4247(94)80075-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Piezoresistive elements of polycrystalline semiconductor thin filmsSensors and Actuators, 1988
- Polycrystalline silicon-based sensorsSensors and Actuators, 1986
- Microcrystalline silicon thin films for sensor applicationsSensors and Actuators, 1985