V-groove-isolated i.i.l. circuits
- 18 March 1976
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 12 (6) , 150-151
- https://doi.org/10.1049/el:19760117
Abstract
A new method using V-grooves for dielectric isolation of i.i.l. circuits is described. Basic devices and circuits have been realised and tested. The process results in a simplified, low-temperature isolation step and yields an increased packing density.Keywords
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