New development strategies for high aspect ratio microstructures

• 24 February 1998
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 4  (2) , 94-97
• https://doi.org/10.1007/s005420050104

Abstract

Keywords

• ULTRASOUND
• DEPTH
• QUALITY
• MICROSTRUCTURES
• DEPOSITION
• DEVELOPMENT PROCESS
• DEVELOPMENT RATE
• DOSE VALUE
• DIP DEVELOPMENT