Low pressure RF plasma reactions in light hydrocarbons: Methane
- 31 December 1980
- journal article
- Published by Elsevier in Radiation Physics and Chemistry (1977)
- Vol. 15 (2-3) , 485-495
- https://doi.org/10.1016/0146-5724(80)90171-5
Abstract
No abstract availableKeywords
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