Optical properties of titanium and titanium oxide surfaces

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Abstract
The near‐normal incidence reflectivity of titanium has been measured for photon energies of 2–25 eV under closely controlled surface conditions. Measurements, using synchrotron radiation above 5 eV, were made in ultrahigh vacuum on both clean and in situ oxidized surfaces monitored with Auger spectroscopy. The reflectivity data were Kramers‐Kronig analyzed to generate the optical constants. Structure in ε2 appearing in the oxidized surface but absent in the clean surface is related to the oxygen 2p and 2s bands. Some differences in the oxide structure are observed between oxide films grown on titanium exposure to oxygen compared to exposure to an oxygen plasma.