Thickness Dependence of Charge‐Trapping Properties in Ultrathin Thermal Oxides Prepared by Rapid Thermal Oxidation
- 1 February 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (2) , L16-L19
- https://doi.org/10.1149/1.2221092