Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
- 30 June 2003
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 42 (Part 1, No) , 4107-4110
- https://doi.org/10.1143/jjap.42.4107
Abstract
Three-dimensional nanostructures on a glass capillary have a number of useful applications such as manipulators and sensors in the various microstructures. This time, we have demonstrated the fabrication of a nozzle nanostructure on a glass capillary for a bio injector by 30 keV Ga+ focused-ion-beam assisted deposition with a precursor of phenanthrene vapor and etching. It has been demonstrated that nozzle nanostructures with various shapes and sizes have been successfully fabricated. An inner tip diameter of 30 nm on a glass capillary and a tip shape with an inclined angle have been realized.Keywords
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