Micromachining with cluster ions
- 31 December 1989
- Vol. 39 (6) , 541-542
- https://doi.org/10.1016/0042-207x(89)90629-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Energetic cluster impacts on thin gold and tantalum filmsThe Journal of Physical Chemistry, 1986
- Larger cluster ion impact phenomenaChemical Reviews, 1986