CW LASER ANNEALING STUDIES OF DEPOSITED FILMS
- 1 January 1980
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Crystallization of amorphous silicon filmsPhysica Status Solidi (a), 1978
- Columnar microstructure in vapor-deposited thin filmsThin Solid Films, 1977
- Silicon epitaxy by solid-phase crystallization of deposited amorphous filmsApplied Physics Letters, 1977
- Influence of 16O, 12C, 14N, and noble gases on the crystallization of amorphous Si layersJournal of Applied Physics, 1977
- The crystallization of amorphous silicon filmsJournal of Non-Crystalline Solids, 1972