Reduction of stresses in thin films by high energy ion beams
- 1 May 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 127-128, 43-45
- https://doi.org/10.1016/s0168-583x(96)00850-6
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Effect of substrate heating and high energy heavy ion irradiation on the performance of Cr filmsJournal of Vacuum Science & Technology A, 1995
- Relaxation of residual stresses in highly stressed multilayers initiated by ion irradiationSurface and Coatings Technology, 1995
- A physical basis for stress reduction during ion beam assisted depositionScripta Metallurgica et Materialia, 1995
- A physical basis for irradiation-induced modification of thin-film stressesThin Solid Films, 1995
- Stress evolution in ion assisted thin metal film depositionRadiation Effects and Defects in Solids, 1994
- Internal stress and structure of ultrahigh vacuum evaporated chromium and iron films and their dependence on substrate temperature and oxygen partial pressure during depositionThin Solid Films, 1990
- Irradiation creep due to the growth of interstitial loopsPhilosophical Magazine, 1973
- The growth of interstitial clusters in graphite under irradiationPhilosophical Magazine, 1966