Polymers Constituted by Methyl Methacrylate, Methacrylic Acid, and Methacryloyl Chloride as a Positive Electron Resist
- 1 November 1979
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 126 (11) , 1881-1884
- https://doi.org/10.1149/1.2128819