Delivery of pure ozone in ultrahigh vacuum
- 1 May 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 18 (3) , 992-994
- https://doi.org/10.1116/1.582288
Abstract
An apparatus designed to produce and deliver pure ozone to a sample inside a metal ultrahigh vacuum apparatus is described. Ozone of 96%–97% purity is prepared in a glass vacuum system and converted to a molecular beam of known flux using an all glass doser. The storage lifetime of the O3 at Torr pressure in the glass storage vacuum system (containing a small surface area of metal) has been measured, and it is shown that the rate of O3 destruction during storage is inconsequential for hours of storage.Keywords
This publication has 10 references indexed in Scilit:
- Adsorption of oxygen on Au(111) by exposure to ozoneSurface Science, 1998
- Gas phase ozone decomposition catalystsApplied Catalysis B: Environment and Energy, 1997
- Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfacesSurface Science, 1995
- A versatile low-pressure ozone sourceJournal of Vacuum Science & Technology A, 1991
- Ozone jet generator as an oxidizing reagent source for preparation of superconducting oxide thin filmReview of Scientific Instruments, 1991
- Chemisorption of high coverages of atomic oxygen on the Pt(111), Pd(111), and Au(111) surfacesJournal of Vacuum Science & Technology A, 1990
- In Situ Growth of Bi-Sr-Ca-Cu-O Thin Films by Molecular Beam Epitaxy Technique with Pure OzoneJapanese Journal of Applied Physics, 1989
- Capillary array dosing and angular desorption distribution measurements: A general formalismJournal of Vacuum Science & Technology A, 1988
- Calibration of a mass spectrometer experiment for ozoneReview of Scientific Instruments, 1981
- Simple Method of Preparing Pure OzoneReview of Scientific Instruments, 1968