Summary Abstract: Influence of substrate misorientation on defect and impurity incorporation in AlGaAs/GaAs heterojunctions grown by molecular-beam epitaxy
- 1 March 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (2) , 615-616
- https://doi.org/10.1116/1.584413
Abstract
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