The influence of Sb as a surfactant on the strain relaxation of Ge/Si(001)

• 1 July 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 9  (4) , 2146-2149
• https://doi.org/10.1116/1.585754

Abstract

Keywords

• X RAY DIFFRACTION
• LAYER BY LAYER
• CRYSTAL STRUCTURE
• STRESS RELAXATION
• PHYSICAL PROPERTIES
• SPECULAR REFLECTION
• SPECTRAL REFLECTANCE
• SURFACE ENERGY
• DISLOCATIONS