The effect of the source optics and the temperature of the sputter surface on the negative ion yield of the sputter source MISS-4M
- 15 February 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 220 (1) , 112-114
- https://doi.org/10.1016/0167-5087(84)90419-8
Abstract
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