Internal Stresses

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Abstract
Vacuum-deposited films generally exhibit remarkable internal stresses. The various attempts to explain the origin of these stresses, especially of those produced during the condensation will be discussed. Based on the “Step Rule” for crystal growth (Ostwald, 1897) a new model will be proposed. Its applicability will be demonstrated by discussing results for gallium,bismuth, and several other materials. This model yields an interpretation for the stress-free growing of amorphous films as well as for the occurrence of compressive stresses under special conditions and for special materials.

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