Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.
- 1 January 1994
- journal article
- Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
- Vol. 7 (3) , 473-482
- https://doi.org/10.2494/photopolymer.7.473
Abstract
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