Thin polyimide films prepared by a vacuum deposition process (VDP): morphology and properties
- 19 November 1993
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 752-757
- https://doi.org/10.1117/12.162734
Abstract
Thin polyimide films, prepared by vacuum deposition, have been investigated. The influence of the nature of the monomers, evaporation rate, treatment of the substrate and post- preparation treatment (imidization) of the layers on the structure are discussed. Infrared spectra and thermogravimetric analysis results are consistent with the interpretation that VDP films produced are polyamic acid curable to polyimide. The morphology and properties have been characterized by electron microscopy.Keywords
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