Nanolithography with an atomic force microscope

• 1 October 1996
• journal article
• Published by Elsevier in Superlattices and Microstructures
• Vol. 20  (3) , 349-356
• https://doi.org/10.1006/spmi.1996.0088

Abstract

Keywords

• FABRICATION
• ARRAYS
• TIP
• HOLE
• REGIME
• FORCE MICROSCOPE
• LITHOGRAPHIC
• ATOMIC FORCE