Silicon Wafer Annealing Effect in Loop Defect Generation

• 1 October 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (10) , 1514-1523
• https://doi.org/10.1143/jjap.13.1514

Abstract

Keywords

• LOOP DEFECT
• DEFECT GENERATION
• SILICON WAFER
• WAFER ANNEALING EFFECT