Trapping centres in sputtered SiO2 films
- 3 September 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 62 (1) , 89-96
- https://doi.org/10.1016/0040-6090(79)90386-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Discharge of MNOS structuresSolid-State Electronics, 1973
- Theory and experiments on surface 1/f noiseIEEE Transactions on Electron Devices, 1972
- Analysis of evaporated silicon oxide films by means of (d, p) nuclear reactions and infrared spectrophotometryPhysica Status Solidi (a), 1971
- Fowler-Nordheim Tunneling into Thermally Grown SiO2Journal of Applied Physics, 1969